Residual Gas Analysis and Mass Spectroscopy
Residual Gas Analysis (RGA) with a quadrupole mass spectrometer is the most sensitive and versatile method for understanding what goes on in your vacuum chamber and process. It can be used to detect leaks from the outside to the inside of your vacuum vessel. It can be used to detect leaks through valves. It is very useful for measuring outgassing and other types of contamination. RGA instruments can be used for process control in processes using chemical reactants.
Operating an RGA requires a high degree of training and skill. Not all organizations have such a person on staff or are willing to train staff to operate the instrument. MBTS can resolve that problem. MBTS can set up and RGA on your process, qualify it for a particular task, set process tolerance limits, train operators and remotely monitor the instrument, eliminating the need for an on-site expert.
MBTS provides a practical solution to the problem of needing an expert in mass spectrometry, to enable the use of an RGA.
Learn More About Residual Gas Analysis
Mass spectroscopy can be used to ensure that chemistry of processing at low pressures is what it is supposed to be. Reactant and product concentrations can be accurately measured. The presence of impurities can be determined. Process endpoints can be accurately assessed for better process control and equipment utilization. RGAs give you the ability to see what is going on in your process.